WDK 干涉测量镜头
适合非接触光学压型
可选Michelson (2x and 5x) 镜头
F=200mm镜筒远场校正设计
用途:
干涉测量镜头可用在非接触光学压型测量设备上,通过此镜头可得到表面位图和表面测量参数等。也可用来检测表面粗糙度,测量精度非常高,在一个波长之内。一束光通过分光镜,可将光直接射向样品表面和内置反光镜。从样品表面反射的光线通过再结合,就产生了干涉图案。Michelson镜头拥有更长的工作距离,更宽的视场和更大的焦深。采用F=200mm镜筒的话可将镜头直接装配到C接口相机上。
WDK Interferometry Objectives
Suitable for Non-Contact Optical Profiling
Michelson (2x and 5x)
Infinity Corrected F=200mm Tube Lens Design
Interferometry objectives are used in non-contact optical profile measurement devices to obtain surface maps and surface measurement parameters. They can be used to examine surface topography with very high precision—to within a fraction of the wavelength of light. In these objectives, a light beam passes through a beamsplitter, which directs the light to both the surface of the sample and a built-in reference mirror. The light reflected from these surfaces recombines and a fringe interference pattern is formed. The Michelson objectives provide comparatively longer working distances, wider fields of view and larger depth of focus, whereas the the F=200mm tube lens allows these objectives to be integrated to a C-Mount camera.
技术参数:
倍率2X5XNA0.0550.14W.D(mm)1515焦点距離(mm)10040分解能 (µm)52被写界深度(µm)9114实视场2/3"; Sensor (mm)4.4 x 3.31.76 x 1.32实视场1/2"; Sensor (mm)3.2 x 2.41.28 x 0.96重量 (g)430450
干涉镜头市场价:
IFS APO 2X 105000元/个
IFS APO 5X 63000元/个
专利号 : 201120353670.3 ;
用途 : 非接触光学压型测量设备 ;
较近工作距离 : 15(mm) ;
测量分辨率 : 2微米 ;
测量范围 : 小于一个波长 ;
品种 : 其他干涉仪 ;
型号 : IFS APO 5X ;
** : 日本WDK ;
类型 : 白光干涉仪 ;
加工定制 : 是 ;