6ES7951-0KG00-0AA0 6ES7953-8LJ20-0AA0 6ES7952-0KF00-0AA0 6ES7960-1AA00-0XA0 6ES7964-2AA01-0AB0 6ES7972-0BA12-0XA0 6ES7972-0AA01-0XA0 6ES7972-0BA41-0XA0 6ES7972-0BB41-0XA0 6ES7972-0CA23-0XA0 6ES7972-0CB20-0XA0 6FM1707-3AA10 6FM1721-3AA20 6GK1102-6AA00 6GK1102-4AA00 6GK1 143-0AA01